New (super) self aligned MOS controlled thyristors, (S)SAMCTs,switching 20 A at 4 kV

摘要

New MOS controlled thyristor structures, called (Super) SelfAligned MOS Controlled Thyristors, (S)SAMCTs, have been fabricated andcharacterized. A simplified cathode structure in which all criticallayers are self aligned enables the fabrication of reliable large areadevices with reduced technology complexity. Small experimental devicesshow equivalent electrical performance compared to conventional MCTs.Successfully fabricated large area (1 cm-2) SAMCTs are ableto turn off 20 A at 4 kV in 5 μs under inductive load without anysnubber