Investigation of Plasma Parameters and Mode Transition in Inductively Coupled Plasma with Hydrogen Oxygen gases

摘要

We investigated basic property of inductively coupled plasm（ICP）for RF（13.56 MHz）input power with hydrogen andoxygen gases. In the phase difference characteristics of the current and voltage waveforms for hydrogen, the phase differencelargely changed around 220 W at 14 Pa and 250 W at 19 Pa. At 14 Pa and 19 Pa of oxygen plasma, the power values which thephase difference changes rapidly were 210 W and 220 W, respectively. Therefore, it was expected that the mode of dischargetransition from E to H mode.