From Memory to Sensor: ultra-Low Power and High Selectivity Hydrogen Sensor Based on ReRAM Technology

摘要

We have fabricated a novel hydrogen sensor using optimized 0.18-μm ReRAM process. Our ReHsensor (Resistive Hydrogen Sensor) conforms with the ISO26142 standard in that it exhibits exceptional sensing capabilities, including high sensitivity, wide hydrogen concentration range (up to 4 vol.%) in air and N₂ ambient, high gas selectivity (no reaction with CH₄, CO, CO₂, CH₃OH, and CH₃COCH₃) and is immune to poisoning by SO₂ and hexamethyl disiloxane (HMDS). As it does not require a heater, the power consumption of the ReHsensor is very low, at 0.35 mW. We used this hydrogen sensor device to develop a battery-powered all-in-one wireless hydrogen sensor unit for IoT applications.