Design and test of a novel planar 3-DOF precision positioning platform with a large magnification

摘要

This paper presents the design, analysis and test of a novel planar 3-DOF (degree of freedom) precision positioning platform. Three two-level lever amplifiers are utilized to get a large amplification ratio. A more accurate flexible bending model of the lever amplifier is created to calculate the displacement loss relative to the PRBM (pseudo-rigid-body model). The displacement loss factor, the drift displacement loss factor and the bending displacement loss factor of a lever amplifier are defined, respectively. This model is verified by the simulation on the amplification ratio. A dynamics model is established by simplifying the flexure hinge into the ideal revolute joint with a constant torsional stiffness. This model is verified by the simulation and prototype test on the natural frequency. Above two accurate models can well predict the performance of the platform. The prototype test on the workspace and resolution shows that this platform possesses a large magnification with a high positioning resolution.