Review and prospects for VPE, MOVPE, MBE and CBE (MOMBE) of InP andrelated materials

摘要

The market for InP-based epitaxies is still small and thedifferent production methods coexist. Novel sources may renew theinterest in Solid Source MBE. In MOVPE and CBE the tendency is towardslower temperatures and increased safety. Two novel families of materialsare studied. The main challenges are cheap optoelectronic devices forthe subscriber access network and very high speed microelectronics