Novel ferroelectrics-based micro-acoustic devices and their ultrasonic applications

摘要

Novel ferroelectric thin film based micro-acoustic devices have been designed and fabricated using silicon based micro-machining process. These devices have excellent performance, miniature size and high reliability, and could be compatible with conventional integrated circuit process. And more important, they can be both used as microphone and microspeaker. The micro-acoustic devices could find wide and novel application in practical ultrasonic systems.