National Institute of Standards and Technology programs inelectrical measurements for electronic interconnections

摘要

The National Institute of Standards and Technology operates anumber of research projects to advance measurement science andtechnology for the microelectronic industries. We report here on onecomponent of the NIST program, the fundamental electricalcharacterization of electronic interconnections through accuratemeasurement. We have developed and continue to develop measurementtechniques for fully calibrated time-domain network analysis, lossytransmission lines on silicon, coupled transmission lines, fullycalibrated multiport network analysis, low dielectric constant thin-filmmaterials, and at-speed test