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Off-axis catadioptric partial compensator design for interferometric measurement of optical freeform surface

机译:离轴折反射部分补偿器设计,用于光学自由曲面的干涉测量

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Optical freeform surfaces have been widely used in optical systems owing to their design degrees of freedom, which cansimplify the structure and improve the performance of optical systems. High accuracy testing for freeform surface isneeded due to the improvement of machining accuracy. However, it is still a challenge to achieve high measuringaccuracy because freeform surfaces lack rotational symmetry. In this paper, an off-axis catadioptric partial compensator(OACPC) design for non-null interferometric method is proposed to measure freeform surface. The design of OACPCconsists of two parts: constructing initial structure and optimizing. The initial structure is obtained by the vectoraberration theory and PW method. Based on the initial structure, the OACPC is generated by modelling and optimizingin the optical design software. In order to verify the feasibility, universality and effectiveness, a design example is given.Theoretical analysis and simulation results demonstrate that the design can realize the measurement of freeform surfaces.
机译:光学自由曲面由于其设计自由度而在光学系统中得到了广泛的应用, 简化结构并提高光学系统的性能。自由曲面的高精度测试是 由于提高了加工精度而需要。但是,实现高测量仍然是一个挑战 精度,因为自由曲面缺乏旋转对称性。本文采用离轴折反射部分补偿器 提出了一种非零干涉法(OACPC)设计,用于测量自由曲面。 OACPC的设计 包括两个部分:构建初始结构和优化。初始结构是通过向量获得的 像差理论和PW方法。基于初始结构,通过建模和优化来生成OACPC 在光学设计软件中。为了验证其可行性,通用性和有效性,给出了一个设计实例。 理论分析和仿真结果表明,该设计可以实现自由曲面的测量。

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