首页> 外文会议>International Conference on Optical Metrology and Inspection for Industrial Applications;Chinese Optical Society;Society of Photo-Optical Instrumentation Engineers;Tsinghua University >High Accurate Three-dimensional Shape Measurement of Discontinuous Specular Surfaces by Stereo Direct Phase-Measuring Deflectometry
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High Accurate Three-dimensional Shape Measurement of Discontinuous Specular Surfaces by Stereo Direct Phase-Measuring Deflectometry

机译:立体直接相测量偏折法高精度测量非连续镜面的三维形状

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With the fast development of integrated circuits, photovoltaics, automobile industry, advanced manufacturing, andastronomy, it is particularly important to obtain the three-dimensional (3D) shape data of specular objects quickly andaccurately. Owing to the advantages of large dynamic range, non-contact operation, full-field and fast acquisition, highaccuracy, and automatic data processing, phase-measuring deflectometry (PMD, also called fringe reflectionprofilometry) has been widely studied and applied in many fields. Direct PMD (DPMD) can directly establish therelationship between phase and depth data without gradient integration process, so it can be used for 3D shapemeasurement of specular objects having discontinuous surfaces. However, compared with gradient data, depth data ismore sensitive to measurement noise, so the measurement accuracy obtained by gradient field integration is higher. Inorder to make use of the anti-noise property of gradient measurement structure, some PMD techniques usually abandonthe height data obtained from the intermediate process and use the gradient data to complete the surface reconstruction.Stereo deflectometry is a typical representative to retrieve 3D shape of the measured object according to the gradientintegration. It calculates the gradient field based on the uniqueness of the normal vector of the object points by using twocameras. Although obtaining high-precision measurement results, this method cannot be used for the measurement ofdiscontinuous objects. In this paper, a new stereo DPMD method is proposed to obtain 3D shape of specular objectshaving discontinuous surfaces. Some experimental results on measuring discontinuous specular objects verify the highprecision of the proposed stereo DPMD method.
机译:随着集成电路,光伏,汽车工业,先进制造和 在天文学中,快速获得镜面物体的三维(3D)形状数据特别重要, 准确。由于动态范围大,非接触式操作,全场和快速采集,高 精度和自动数据处理,相位测量偏折法(PMD,也称为条纹反射) 轮廓测量法)已被广泛研究并应用于许多领域。直接PMD(DPMD)可以直接建立 相位和深度数据之间的关系,无需进行梯度积分处理,因此可用于3D形状 测量具有不连续表面的镜面对象。但是,与梯度数据相比,深度数据是 对测量噪声更敏感,因此通过梯度场积分获得的测量精度更高。在 为了利用梯度测量结构的抗噪特性,通常会放弃一些PMD技术 从中间过程获得的高度数据,并使用梯度数据完成表面重建。 立体偏折法是根据梯度检索被测对象的3D形状的典型代表 一体化。它根据目标点法线向量的唯一性来计算梯度场,方法是使用两个 相机。尽管获得了高精度的测量结果,但该方法不能用于测量 不连续的物体。本文提出了一种新的立体DPMD方法来获得镜面物体的3D形状 具有不连续的表面。测量不连续镜面物体的一些实验结果验证了高 提出的立体声DPMD方法的精度。

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