Design of 940-nm VCSEL with metastructure

摘要

Vertical-cavity surface-emitting lasers (VCSELs) have wide applications in data communication, sensing, and consumerelectronics, because they have many advantages, such as circular beam, low power consumption, high modulation speed,low cost, high reliability, and 2D array configuration. Metastructure has many unique optical properties and is suitablefor novel VCSELs. Here we study the TE-polarization high-contrast grating for 940 nm wavelength range and designhigh-quality HCG-based vertical cavities with heterostructures aiming at HCG-VCSEL. The TE-polarization HCGVCSELat 940 nm is finally designed with a Q-factor of 3.6×10~5.