Extreme-Ultraviolet Pellicle Durability Comparison for Better Lifetime

摘要

To accelerate extreme ultraviolet lithography manufacturing, a better pellicle which has a longer lifetime is required.Various materials and their combinations are suggested and implemented to extend the lifetime. Using finite elementmethod, we analyzed the mechanical behavior of pellicle in terms of crack time when a pellicle begins to tear off.Without thermal property analysis, we were able to get relative crack times for various pellicle structures. Single walledcarbon nanotube has the largest relative crack time but needed to be commercialization and multi-layer pSi core pelliclehas longer lifetime than a single pSi core pellicle. Additionally, increasing Ru capping layer helps to strengthen themechanical properties of the pSi core pellicle.