Wafer-level inspection platform on high-volume photonic integrated circuits for drastic reduction of testing time

摘要

We describe a wafer prober integrated with an optical probe for wafer-level inspection of photonic integrated circuits.The design of the electric and photonic circuit was optimized for wafer-level inspection. The customized prober andcircuit design enabled us to perform high-volume and high-speed inspection of over 400 elements, and sufficientlyreliable results were obtained. It took about 10 sec. to evaluate the propagation loss of an element. This technology willbe a key to reducing the costs of photonic devices.