Due to the continuing trend to minimize micro structures on technical surfaces the requirements on measuringsensors are also increasing. This includes the lateral and axial resolution as well as the measuring speed. Thelatter is provided by using optical sensors like confocal microscopes, laser and coherence scanning interferometers.However, artifacts may occur in the measurement result leading to an erroneous reproduction of the surface tobe measured. In order to investigate these artifacts and to optimize the setup of optical sensors the measuringresults of dierent optical sensors can be compared among each other as well as with further sensors by usinga multisensor measuring setup. Important characteristics of topography sensors are their axial accuracy andthe lateral resolution. For this purpose, a standardized repeatability is determined for each sensor. In addition,measurements on technical surfaces to investigate the lateral resolution are presented.
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