Surface area topography e.g. extreme ultraviolet lithography, measuring device, has inclination sensor connected with measuring head for determination of inclination relative to fixed spatial direction

摘要

The device has a measuring head displaceable via a surface area (4), where the measuring head (MS) has several contactless sensors e.g. distance or angular sensors. An inclination sensor (NM1) is connected with the measuring head for determination of the inclination relative to a fixed spatial direction, where the fixed spatial direction is the direction of the force of gravity. The measuring head is swivelably fixed at another inclination sensor (NM2) in a defined measure.