Experimental study of temperature effects in vibrating beam and thickness-shear resonators of GaPO₄ machined by ultrasonic milling

摘要

We report progress in modeling and measuring temperature effects in vibrating beam gallium orthophosphate (GaPO₄) resonators. In addition to the well known thickness-shear AT-cut, temperature compensated cuts exist in GaPO₄ for length extensional, flexural and torsional modes. Analytical models of temperature effects are compared with experimental measurements on devices fabricated on AT (Y-16.1° ) and Z-cut plates by ultrasonic machining. The agreement between theory and experiment is fairly good taking into account that temperature coefficients of GaPO₄ have been experimentally tested for only a few thickness-shear resonators.