Quartz thickness-shear mode resonator temperature-compensated pressure transducer with matching thermal time constants of pressure and temperature sensors

摘要

A pressure transducer assembly for measuring fluid pressure. The transducer assembly includes a thickness-shear mode resonator pressure sensor and a thickness-shear mode resonator temperature sensor for temperature compensation of the pressure sensor. Both sensors are exposed to the pressurized fluid, and possess similar thermal time constants. The temperature sensor possesses a pressure sensitivity less than that of the pressure sensor, and a temperature sensitivity greater than that of the pressure sensor. The pressure and temperature sensors may be of similar size and configuration, and may be fabricated from the same material, such as quartz.