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New methodology of dynamic lot dispatching: required turn rate

机译:动态批次分配的新方法:所需的周转率

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摘要

In a semiconductor manufacturing fab with production-to-order typeoperation, hundreds of devices and various processes are managed. Toprovide short cycle time and precise delivery to satisfy customers'expectation is always the major task. The difficulties encountered arecomplex process and product mix, unscheduled machines down time andequipment arrangement. How to dispatch lots effectively has become avery important topic in handling manufacturing. A dispatching algorithmnamed “Required Turn Rate (RTR)” is developed. According tothe level of current wafers in process (WIP), RTR algorithm revises thedue date for every lot to satisfy the demand from Master ProductionScheduling (MPS). Further to calculate the required turn rate of eachlot based on process flow to fulfill the delivery requirement. RTRalgorithm determines not only due date and production priority of eachlot, but also provides required turn rate for local dispatching.Therefore, local dispatching systems of each working area will dispatchthe lots by using required turn rate to maximize output and machinesutilization
机译:在按订单生产的半导体制造工厂中 操作,数百个设备和各种过程得到管理。到 提供较短的周期时间和精确的交货期,以满足客户的需求 期望永远是主要任务。遇到的困难是 复杂的过程和产品组合,计划外的机器停机时间以及 设备安排。如何有效地分配批次已成为一个 在处理制造中非常重要的主题。调度算法 开发了名为“所需的转弯率(RTR)”的产品。根据 在当前晶圆级别(WIP)的情况下,RTR算法修改了 每个批次的到期日,以满足主生产的需求 排程(MPS)。进一步计算每个所需的转弯率 基于流程来满足交付要求。 RTR 该算法不仅确定每个产品的到期日和生产优先级 很多,但也提供了本地调度所需的周转率。 因此,每个工作区域的本地调度系统将进行调度 通过使用所需的周转率最大程度地提高产量和机器 利用率

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