Reproducibility in plasma polymerized methane films as determinedby contact electrification measurements

摘要

The problem of charge variability has been resolved for plasmapolymer films on silicon substrates using the contact-separationtechnique. Charge measurements demonstrated that variability in contactcharging on samples deposited simultaneously is much lower thanpreviously reported. The progress in this area is believed to be due tothe fact that the films are uniform in thickness and are deposited onsmooth substrates with controlled and reproducible depositionconditions. The effect of postdeposition ambient on the stability offilm properties was also studied by monitoring the electrical propertiesover time with the contact-separation measurement. A postdepositionoxygen soak was found to minimize the changes in electrical parameters