Theoretical study on thermal wave laminated imaging in scanning electron-acoustic microscopy

摘要

The theory of thermal wave laminated imaging in scanning electron-acoustic microscopy is studied. One-dimensional thermal conduction and thermoelastic models are introduced to obtain the temperature field and the acoustic field in sample. Because the thermal sources at different depths produce the acoustic signals with different phases, the acoustic signals with different phases are contributed by the structures of different depths. Finally, the laminated imaging can be obtained by selecting the different phases of the signals, then the quantitative laminated imaging are analyzed reasonably and effectively.