Modelling of the microelectromechanical system gyroscope’s toothed resonator

摘要

The object of the research is the toothed resonator of a vibrating ring microelectromechanical system gyroscope. The mathematical model of the device is suggested and implemented in the simulation software. The main development stages of the model are produced, simulation experiments with the usage of a finite element method are described. At balancing accomplishment, the toothed resonator allows receiving smaller values of frequency splitting that proves the benefit of the suggested structure in comparison with the known decisions. The results of the work can be used when developing micromechanical inertial sensors of unmanned aerial vehicles.