Frequency Response Study for a Ramped Field Induced Mass Transport Phenomenon

摘要

Electric field induced mass transport, known as electromigration, can be used to create micro- or nano- scale patterns on a solid surface [1]. This paper reports the liquid phase mass transfer phenomenon observed on metallic thin films of Chromium under the influence of ramp-type alternating electric current of high densities. On application of a strong electric field, the layers of the metal seem to react and convert into a liquid compound in presence of air, which flows out radially from the electrodes in a near circular manner. For this study, waveform pattern of the alternating potential was chosen to be ramp waves. On application of alternating potential of various frequencies, ranging from 100 Hz to 700 Hz in steps of 50 Hz, the distance of flow was measured against time, as well as the maximum radius of the flow, before it ceased flowing, as a function of frequency was studied. Also, an attempt was made to put forward the possible reasons which could explain the observations made. This study will help in understanding flow properties leading to greater control over the nanolithography process.