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Frequency Response Study for a Ramped Field Induced Mass Transport Phenomenon

机译:斜波场引​​起的质量输运现象的频率响应研究

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Electric field induced mass transport, known as electromigration, can be used to create micro- or nano- scale patterns on a solid surface [1]. This paper reports the liquid phase mass transfer phenomenon observed on metallic thin films of Chromium under the influence of ramp-type alternating electric current of high densities. On application of a strong electric field, the layers of the metal seem to react and convert into a liquid compound in presence of air, which flows out radially from the electrodes in a near circular manner. For this study, waveform pattern of the alternating potential was chosen to be ramp waves. On application of alternating potential of various frequencies, ranging from 100 Hz to 700 Hz in steps of 50 Hz, the distance of flow was measured against time, as well as the maximum radius of the flow, before it ceased flowing, as a function of frequency was studied. Also, an attempt was made to put forward the possible reasons which could explain the observations made. This study will help in understanding flow properties leading to greater control over the nanolithography process.
机译:电场引起的质量迁移,称为电迁移,可用于在固体表面上创建微米或纳米级图案[1]。本文报道了在高密度的斜坡型交流电的作用下,在铬的金属薄膜上观察到的液相传质现象。在强电场的作用下,金属层似乎在存在空气的情况下发生反应并转化为液体化合物,空气以近乎圆形的方式从电极径向流出。在本研究中,交流电的波形模式选择为斜波。在施加从100 Hz到700 Hz的各种频率的交流电时,以50 Hz为步长,根据距离和时间,测量了流动距离随时间的变化以及流动的最大半径。研究了频率。此外,尝试提出可能的原因可以解释所观察到的现象。这项研究将有助于理解流动特性,从而更好地控制纳米光刻工艺。

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