Design and Simulation Study of a New Flared-U Shaped Springs Based MEMS Piezoelectric Vibration Energy Harvester

摘要

The paper presents a MEMS energy harvester based on new two symmetrical Flared-U shaped unimorph spring structures which is capable to harvest energy from low frequency-based vibration. It comprises a silicon substrate beam integrated with Lead Zirconate Titanate (PZT-5H) piezoelectric material and a silicon proof mass. This device is designed and optimized utilizing COMSOL multiphysics 5.4 (licensed version). First natural frequency of the 28.6 Hz is observed by COMSOL simulation. Finite element method (FEM) simulator COMSOL Multiphysics based simulations shows that the proposed structure is able to extract 10.738 nW power from low resonant frequency of 28.6 Hz and low acceleration of 0.07 g over $120 mathrm{k}{Omega}$ load resistance.