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Antireflection coating with both super-hydrophilicity and photocatalysis effect

机译:兼具超亲水性和光催化作用的减反射涂层

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An anti-reflection (AR) coating which simultaneously realizes super-hydrophilicity and photocatalysis is successfully developed to provide a clear view for emerging sensing camera lenses. Super-hydrophilic SiO2-Na2 O layer on the surface and underlying photocatalytic TiO2 layer are connected via nano-structured tunnels fabricated by reactive dry etching technique. A self-assembled Ag nano-mask is adopted instead of lithography to pattern the nano-structure on curved surface of lenses which is normally challenging in lithography processes. The size and pitch of the nano-structure are optimized by changing the deposition condition of Ag in terms of photocatalysis efficiency and light scattering. These techniques have achieved two distinct and favorable functions even on the curved surfaces of lenses while still maintaining low reflectivity.
机译:成功开发了同时实现超亲水性和光催化作用的减反射(AR)涂层,可以为新兴的传感相机镜头提供清晰的视野。超亲水性SiO 2 -Na 2 表面上的O层和下面的光催化TiO 2 层通过反应干法刻蚀技术制造的纳米结构隧道连接。采用自组装的银纳米掩膜代替光刻技术,可以在镜片的曲面上对纳米结构进行构图,这在光刻工艺中通常是有挑战性的。通过改变Ag在光催化效率和光散射方面的沉积条件,可以优化纳米结构的尺寸和间距。这些技术即使在镜片的曲面上也实现了两个独特而有利的功能,同时仍保持了低反射率。

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