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Nanoscale etching of microporous coatings for broadband antireflection coatings

机译:宽带减反射涂层的微孔涂层的纳米级蚀刻

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Broadband antireflection coatings are of great scientific and technological significance in optical areas because of their high transmission in broad wavelength bands. Here, we report an effective and simple approach to create broadband antireflection coatings based on nanoscale etching. To acquire broadband antireflection coatings, coatings with homogenously distributed pores were prepared by thermal treatment of polymer doped silica coatings and then were subjected to aqueous etching. The aqueous etching had selectivity along the thickness of the coatings, resulting in a graded porous morphology with more porosity on the top and less porosity at the bottom. The coatings with graded porosity exhibited excellent broadband antireflection likely due to the graded refractive index. The transmission of the coatings could be controlled by varying the amount of the polymer additives and the coating thickness. The optimized coating showed transmittance higher than 98% from 350 to 1100 nm, which is comparable to current state-of-the-art broadband antireflection coatings. The aqueous etching based approach enables easy access to broadband antireflection coatings on a wide range of optical substrates, and presents a promising alternative to existing technologies for fabrication of broadband antireflection coatings.
机译:宽带减反射膜在光学领域具有重要的科学技术意义,因为它们在宽波段具有高透射率。在这里,我们报告了一种有效且简单的方法来创建基于纳米级蚀刻的宽带抗反射涂层。为了获得宽带抗反射涂层,通过对聚合物掺杂的二氧化硅涂层进行热处理来制备具有均匀分布的孔的涂层,然后对其进行水蚀刻。水性蚀刻剂沿着涂层的厚度具有选择性,从而形成渐变的多孔形态,其顶部具有较高的孔隙率,而底部则具有较少的孔隙率。具有梯度孔隙率的涂层可能由于梯度折射率而表现出优异的宽带抗反射性。可以通过改变聚合物添加剂的量和涂层厚度来控制涂层的透射率。经过优化的涂层在350至1100 nm范围内的透射率高于98%,与当前的最新宽带抗反射涂层相当。基于水蚀刻的方法使得能够容易地获得各种光学基底上的宽带抗反射涂层,并且提出了一种用于制造宽带抗反射涂层的现有技术的有前途的替代方案。

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