3D Dual-Shell Micro-Resonators for Harsh Environments

摘要

This paper presents the recent advancements in the development of three-dimensional fused quartz dual-shell microresonators for environmentally-challenging applications, where the precision measurements are made through shock and vibrations. The dual-shell micro-resonators made from fused quartz and demonstrate a mechanical Q-factor of well above 1 million. An integration and assembly process for capacitive actuation and detection of such resonators using a silicon-in-glass electrode substrate was developed, and electrostatic tuning of $mathbf{n}=mathbf{2}$ wineglass using out-of-plane electrodes was demonstrated experimentally. We also present a simulation framework based on the Finite Element Method. The modeling approach was used to derive the critical design parameters of the dual-shell micro-gyroscopes for survivability under harsh shock waveforms. The developed 3D dual-shell structure is a potential solution for microresonators and gyroscopes for operation in harsh environments.