Dynamic Analysis and Simulation of the High-Acceleration Rotating Arm in the Precise Positioning Process

摘要

The high-acceleration rotating arm is a key component in integrated circuit manufacturing equipment, the movement precision of which directly affects the accuracy of equipment. Therefore, it is essential to analyse the mechanical dynamics characteristics of the high-acceleration rotating arm. According to the process of sorting chips and the sequence diagram of the process, by virtue of the dynamics analysis software, the dynamics simulation and analysis of the rotating arm for the rigid body and rigid-flexible coupling body has been performed. According to the pick-up process of the chips, the impact of position error resulted from friction when the collet contacting with the chip had been discussed.