首页> 外文会议>ASME International Technical Conference on Packaging and Integration of Electronic and Photonic Microsystems >QUANTITATIVE CHARACTERIZATION OF SAPPHIRE AND SILICON NITRIDE FOR SPACE APPLICATIONS CIRCUIT SUBASSEMBLIES USING CRYOGENIC CYCLING
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QUANTITATIVE CHARACTERIZATION OF SAPPHIRE AND SILICON NITRIDE FOR SPACE APPLICATIONS CIRCUIT SUBASSEMBLIES USING CRYOGENIC CYCLING

机译:用于蓝宝石和硅氮化物在空间应用中的循环定性定量分析

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This research investigates the effects of thermal cycling from room to cryogenic temperatures (300K - 4K) on the thermal expansion coefficient of two ceramic substrates of Silicon Nitride (Si_3N_4) and alpha-Alumina'Sapphire (α-Al_2O_3). Due to the shortage of available data, a comparative study with reference materials, Copper, AISI Carbon Steel 1008 and Molybdenum, are compared to the National Institute of Standards and Technology (NIST) property data as a proof of concept. Accurate thermal contraction data of materials at low temperatures are important in material selection and thermal design of engineered systems, such as, space electronic devices. Thermal expansion mismatch causes substantial problems in space electronic device reliability because of the various stresses imposed on the joint materials undergoing extreme thermal cycles. Theory supports the advantage of utilizing Sapphire (Al_2O_3) and Silicon Nitride (Si_3N_4) within microchip configuration. However, there is limited data available that confidently supports this assertion beyond theory. An electro-mechanical method for in-situ strain measurements is presented as a tool to characterize thermomechanical behavior of Sapphire and Silicon Nitride at temperatures below 50 K. The calculated coefficient of thermal expansion for silicon nitride is 1.35 • 10~(-6) 1/K and 0.994 • 10~(-6) 1/K for sapphire at 5. 7 K. The results from this validation have a mean error percentage of less than 6 %.
机译:这项研究调查了从室温到低温(300K-4K)的热循环对氮化硅(Si_3N_4)和α-氧化铝蓝宝石(α-Al_2O_3)两种陶瓷基板的热膨胀系数的影响。由于缺乏可用数据,因此将参考材料铜,AISI碳钢1008和钼的比较研究与美国国家标准技术研究院(NIST)的性能数据进行了比较,以此作为概念验证。低温下材料的准确热收缩数据对于工程系统(例如空间电子设备)的材料选择和热设计非常重要。由于施加在经受极端热循环的接合材料上的各种应力,热膨胀失配在空间电子设备可靠性中引起了实质性问题。理论支持在微芯片配置中利用蓝宝石(Al_2O_3)和氮化硅(Si_3N_4)的优势。但是,只有有限的数据可以从理论上可靠地支持这一主张。提出了一种机电方法,用于现场应变测量,以表征低于50 K的温度下蓝宝石和氮化硅的热机械行为。计算得出的氮化硅热膨胀系数为1.35•10〜(-6)1 / K和0.994•10〜(-6)1 / K对于5. 7 K的蓝宝石。此验证的结果的平均误差百分比小于6%。

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