Influence of Spare Parts Service Measures on the Performance of Front-End Wafer Production Process

摘要

We are interested in the influence of spare part service measures on the performance of front-end wafer fabrication process. This process is characterized by re-entrant flows exacerbating variability differences. We focus on the bottleneck resource. First, we simulate the spare part supply chain to show the impact of the spare part service measures on the time to repair distribution. Second, we use this distribution to assess the performance of the front-end wafer fabrication process. We conclude that the choice of the spare parts service measure has a high impact on the front-end wafer fabrication process performance. Our methodology could help practitioners making improved decisions regarding spare parts service measure.