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Investigating the Aging Dynamics of Diode-Connected MOS Devices Using an Array-Based Characterization Vehicle in a 65nm Process

机译:使用基于阵列的表征工具在65nm工艺中研究连接二极管的MOS器件的老化动力学

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This work presents measured test-data corresponding to a comprehensive reliability characterization of diode-connected MOS transistors. An array-based test structure, with the specific aim of quantifying the impact of feedback on the aging dynamics for the circuit configuration of interest was designed and implemented in a 65nm Low-Power (LP) process. Through detailed measurement data obtained using the test-vehicle we, (1) characterize the impact of feedback on the aging rate and compare it to the no-feedback case & (2) evaluate the efficacy of iterative simulations for lifetime projection in such scenarios with the method based on the universality of hot carrier degradation extended to the case featuring feedback.
机译:这项工作提出了与二极管连接的MOS晶体管的全面可靠性特征相对应的测得的测试数据。在65nm低功耗(LP)工艺中设计并实现了一种基于阵列的测试结构,旨在量化反馈对感兴趣的电路配置的老化动力学的影响。通过使用测试车辆获得的详细测量数据,我们(1)表征反馈对老化率的影响,并将其与无反馈情况进行比较(2)在这种情况下评估迭代仿真对于寿命预测的有效性基于热载流子退化普遍性的方法扩展到具有反馈的情况。

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