A Novel Optimization Design Method for Multi-Degree of Freedom Vibratory Gyroscope

摘要

To solve the constraints between the sensitivity and bandwidth of MEMS vibratory gyroscopes, a novel optimization design method is proposed. It is based on Dynamic Characteristic Extraction and Response Surface Methodology (RSM) and can optimize sensitivity and bandwidth simultaneously. In this method, constrains are firstly determined by characteristic extraction. Secondly, the central composite design and the least square method are used to build up a second order response surface approximate model of the performance of the vibratory gyroscopes. And then, the model is optimized by taking the verification mass ratio, structure frequency ratio and spring stiffness ratio of gyroscope as design variables, and taking sensitivity and bandwidth as optimization objectives. The results show that the proposed method can greatly improve the optimization efficiency and effectively increase the sensitivity and bandwidth, so as to improve the performance of the multi-DOF vibratory gyroscopes. It can thus be viewed as a new effective method for optimum design of micromachined vibratory gyroscopes.