Additive Fabrication of Multiscale Metasurface by Electrohydrodynamic Nanotexturing of Two-Beam Interference-Patterned Photopolymer Surface

摘要

Adding nanotextures to polymer surfaces already corrugated by 2-beam interference lithography is highly challenging. Using softlithography, triboelectricity, and electrohydrodynamic lithography, we fabricate multiscale metasurfaces by adding nanovolcanoes to sinusoidally corrugated NOA73 surfaces.