A high Q length-extension mode quartz resonator for MEMS oscillator and time-frequency applications

摘要

This paper presents recent advances on two-dimensional Length-Extensional Modes (LEM) quartz micro-resonators providing high quality factor (Q) on resonances at a fewMHz. The resonators have been manufactured with a two teps Deep Reactive Ion Etching (DRIE) in a wafer level process reducing costs for collective realization. Samples vibrating at 2.2 and 3.0 MHz on the fundamental mode have shown promising results with very high Q exceeding 200,000. Best result obtained so far were obtained on a partial mode vibrating at 6.6 MHz reaching a Q of 250,000. The collective process, advantages of quartz and high Q make these resonators a promising candidate for Time & Frequency applications.