Correction of phase delay caused by mixer and lowpass filter in heterodyne interferometer

摘要

Phase response is an essential parameter of vibration sensors in primary vibration calibration, heterodyne interferometer was usually used to obtain this parameter. To reduce sampling rate of heterodyne interferometer signal and sampling number, analog mixer and lowpass filter are used to down-convert the interferometer signal. However, the using of analog devices will introduce additional phase delay for the measurement of the phase response, it leads to the measurement by the calibration is unreliable. A novel correction of phase delay method was proposed to precisely measure the phase response of the vibration sensors. Experiment results show the performance of the proposed correction method.