Sheet resistance and resistivity measurements of thin conducting semiconducting and superconducting films

摘要

In this paper an overview of the sheet resistance and resistivity measurements employing the split post and single post dielectric resonator technique is presented. In the theoretical part basic principles of measurements are described with assessment of the accuracy of measurements. In the experimental part results of measurements of several materials are presented including metals, semiconductors and superconductors. Sheet resistance/resistivity mapping results based on dielectric resonator heads are presented.