Modeling of segmented controlled electrostatically actuated bimorph beams

摘要

Electrostatic actuating bimorph beams are a MEMS device that can be used to control arrays of small micromirrors for optical scanning. Previous research has demonstrated that creating high-angle deflection using long repeating arms of bimorph beams is possible. However, the current devices lack precise control and measurement of the mirror deflection. This research effort proposes a solution to improve control and measurement by using segmented bias channels to control separate portions of the actuation arm. The device will function by allowing a selective actuation of different portions of the bimorph arm. The amount of mirror deflection will vary depending on which segments of the arm are actuated. This paper discusses modeling of these devices using segmented channels to actuate micro-mirrors using finite element analysis (FEA) software programs.