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Active reliability monitor: Defect level extrinsic reliability monitoring on 22nm POWER8 and zSeries processors

机译:主动可靠性监视器:在22nm POWER8和zSeries处理器上的缺陷级别外部可靠性监视

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Monitoring extrinsic reliability performance in a given technology is often performed in a passive manner. Semiconductor devices (die) are sampled out of production environment, subjected to a series of electrical and mechanical stresses, and finally tested extensively to determine if stressing produced additional fails. This strategy is prone to missing issues which are localized to a lots or wafers and is not likely to identify potential field reliability problems early enough to remove samples prior to shipment to the customer. We have created a system which continuously scans memory array repairs (correctable errors) across multiple test steps including Burn In and Voltage Screen, applies a pattern classification algorithm, and enables reliability information to be collected for every die. We will show that monitoring extrinsic defects at Wafer Final Test and through Burn In on every die for every product in a technology is crucial to a robust technology reliability strategy. Additionally we demonstrate a low cost high efficiency system, the Active Reliability Monitor, which accomplishes that goal using 22nm POWER8 and zSeries processor data. The system is shown to provide similar quality data to traditional reliability screening methods while also allowing for automated real time reaction to reliability indicators, specific-defect-type monitoring, and robust monitoring across products in the technology. The tool has enabled the identification of new screen procedures used for the containment of several problematic lots and rapid evaluation of the reliability degradation for any suspect reliability vintages.
机译:监视给定技术的外部可靠性性能通常以被动方式执行。半导体器件(管芯)从生产环境中取样,经受一系列的电气和机械应力,最后进行广泛测试,以确定应力是否还会导致其他失效。这种策略易于遗漏到很多批次或晶圆上的问题,并且不可能足够早地发现潜在的现场可靠性问题,从而无法在运送给客户之前移除样品。我们创建了一个系统,该系统可以跨多个测试步骤(包括“烧入”和“电压屏幕”)连续扫描内存阵列修复(可纠正的错误),应用模式分类算法,并能够为每个芯片收集可靠性信息。我们将证明,在晶圆最终测试中以及通过技术中每个产品的每个管芯上的老化测试监视外部缺陷对于稳健的技术可靠性策略至关重要。此外,我们演示了一种低成本,高效率的系统,即主动可靠性监控器,它使用22nm POWER8和zSeries处理器数据实现了这一目标。该系统显示出可提供与传统可靠性筛选方法相似的质量数据,同时还允许对可靠性指标,特定缺陷类型监控以及该技术产品之间的强大监控进行自动实时反应。该工具能够识别新的筛选程序,以收容几个有问题的批次,并针对任何可疑的可靠性年份快速评估可靠性下降。

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