Real-Time FTIR Monitoring of Parts Per Trillion Level Vapor Intrusions and/or Molecular Contaminations

摘要

The enhanced FTIR measurement method has since been expanded from the initial detection of greenhouse gases to pollutants associated with other industries and their processes, which entail different combinations of hardware components and quantitative analysis methods depending on the target analyte groups. Examples of real-time detection limits pertaining to chemical groups of relevance to semiconductor manufacturing (greenhouse gases, organic amines, ammonia, acids, arsenic aerosols/vapors), fertilizer plus other industrial processes (ammonia, acids), and oil/gas refining plus various industrial solvents (select VOCs) are listed in Table 1 below. These values can be lowered even further when averaging many real-time spectra together to represent a time averaged (say, 8-hour) sample. The temporal resolution of the emission data is lost, but detection limits can be reduced by a factor of ～5-10.