A systematic review on the research headway of piezoelectric diaphragms for micro electromechanical applications

摘要

The fabrication mechanisms of MEMS helps us to develop diaphragms for various applications such as micropumps, microphones, other precise pressure sensors, etc. The fundamental working principle behind all of these devices is based on the pressure applied onto the plates of the diaphragm that causes it to deflect. A comprehensive literature review has been presented in this work focusing on the research headway of piezoelectric diaphragms in different Micro electromechanical applications.