Title:

摘要

Test asphere with the high dynamic range wavefront sensor and high overlapping density subaperture stitching interferometer To fabricate the asphere lens, both the testing of surface figure error and surface alignments error are critical to deliver a tolerance qualifying asphere lens. In this talk we discuss how to speed up asphere testing process by the high dynamic range wavefront sensor (HDR-WFS) and high overlapping density subaperture stitching interferometer (HOD-SSI). In which both the testing devices does not require the preparation of the auxiliary optics such as the null optics or CGH to test asphere figure or alignment testing. The vibration modulated interferometer provide a non-stop phase high over lapping density acquisition process to avoid the lengthy phase shifting process. The interference reference phase is self-calibrated during stitching by over sampling the subaperture interferograms .The HDR-WFS measures the converging or diverging aspherical wavefront directly. A novel calibration process ensure it measure the unsymmetrical wavefront precisely and accurately up to 0.01 waves RMS error.