UV-LIGA microfabrication for high frequency structures of a 220GHz TWT amplifier

机译：UV-LIGA微细加工用于220GHz TWT放大器的高频结构

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In this paper, we fabricate copper high frequency structures for a 220GHz TWT amplifier using UV LIGA technology. The two halves have been assembled and bonded. The measurement results of the folded waveguide circuit show that the attenuation factor of the circuit is 240 dB/m.

机译：在本文中，我们使用UV LIGA技术为220GHz TWT放大器制造了铜高频结构。两半已组装并粘合。折叠波导电路的测量结果表明，该电路的衰减系数为240 dB / m。

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《IEEE International Vacuum Electronics Conference》|2016年|1-3|共3页
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Hanyan Li; Dong Li; Yinfu Hu; Pan Pan; Tianyi Li; Jinjun Feng;
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Copper; Microfabrication; Resists; Attenuation; Vacuum electronics;

机译：铜;微细加工;电阻;衰减;真空电子;

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专利

1. 提高UV-LIGA制备金微细零件的尺寸精度研究 [J] . 曲宁松, 苏兴, 李寒松, 南京航空航天大学学报（英文版） . 2012,第004期
2. Improved Design and Microfabrication of H -Plane and E -Plane Loaded Rectangular Slow-Wave Structure for THz TWT Amplifier [J] . Laxma Reddy Billa, Xianbao Shi, Muhammad Nadeem Akram, Electron Devices, IEEE Transactions on . 2017,第5期

机译：THz TWT放大器的H平面和E平面加载矩形慢波结构的改进设计和微加工
3. Design of confocal waveguide interaction structure for a 220GHz gyro-TWT [J] . Liu Dagang, Tang Xinbing, Yan Yang, Journal of Electromagnetic Waves and Applications . 2017,第4a6期

机译：220GHz Gyro-TWT的共聚焦波导互动结构设计
4. UV-LIGA microfabrication of 220 GHz sheet beam amplifier gratings with SU-8 photoresists [J] . Colin D. Joye, Jeffrey P. Calame, Morag Garven, Journal of Micromechanics and Microengineering . 2010,第12期

机译：使用SU-8光致抗蚀剂的220 GHz平板光束放大器光栅的UV-LIGA微加工
5. UV-LIGA microfabrication for high frequency structures of a 220GHz TWT amplifier [C] . Hanyan Li, Dong Li, Yinfu Hu, IEEE International Vacuum Electronics Conference . 2016

机译：用于220GHz TWT放大器的高频结构的UV-LIGA微型制剂
6. Microfabrication of Thin-Films: From Stretchable Radio-Frequency Electronics, Biodegradable Flexible Electronics, to Micro-Structured Scaffolds [D] . Jung, Yei Hwan. 2017

机译：薄膜的微制造：从可拉伸的射频电子设备，可生物降解的柔性电子器件，微结构脚手架
7. Progress of a 140 GHz 1 kW Confocal Gyro-TWT Amplifier [O] . C. D. Joye, M. A. Shapiro, J. R. Sirigiri, -1

机译：140 GHz1 kW共焦陀螺-TWT放大器的进展
8. IMPROVING THE GAIN-FREQUENCY PERFORMANCE OF CASCADED SINGLE-STAGE DISTRIBUTED AMPLIFIERS WITH BANDPASS FILTER STRUCTURE [O] . Metin Yazgi, Ali Toker 2015

机译：用带通滤波器结构提高级联单级分布式放大器的增益频率性能
9. UV-LIGA Microfabrication of 220 GHz Sheet Beam Amplifier Gratings with SU-8 Photoresists [R] . Joye, C. D., Calame, J. P., Garven, M., 2010

机译：采用sU-8光刻胶的220-GHz片状光束放大器光栅的UV-LIGa微加工

UV-LIGA microfabrication for high frequency structures of a 220GHz TWT amplifier

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