Application of Double Laser Interferometer in the Measurement of Translational Stages' Roll Characteristics

摘要

In order to achieve rapid measurement of larger travel translation stages' roll-angle error in industry and to study the roll characteristics, this paper designs a small roll-angle measurement system based on laser heterodyne interferometry technology, test and researched on the roll characteristics of ball screw linear translation stage to fill the blank of the market. The results show that: during the operation of the ball screw linear translation stage, the workbench's roll angle changes complexly, its value is not only changing with different positions, but also shows different levels of volatility, what's more, the volatility varies with the workbench's work speed. Because of the nonuniform stiffness of ball screw, at the end of each movement, the elastic potential energy being stored from the working process should release slowly, and the workbench will cost a certain time to roll fluctuate before it achieves a stable tumbling again.