Optical profilometry based on light microscopy

摘要

The ability to acquire the profile of surfaces is essential for various applications in manufacturing. Most profilometry techniques can be divided in two categories, contact and non-contact. Non-contact methods mostly rely on interferometry, structured illumination and focus variation. The cost of a commercial profilometer can be prohibitive for small businesses wishing to accurately control their manufacturing processes. Here, we show how a basic light microscope can be modified at a low cost in order to obtain surface profiles. We will describe the add-ons to the microscope, the custom software developed and the image analysis algorithm that retrieved the surface profile from an image stack.