A study scheme of energy harvesting process of MEMS piezoelectric pressure sensor

摘要

Accurate measurement of pressure is a matured application of MEMS pressure sensor. But the self powered sensor is desirable one without compromising the sensitivity and to enhance energy scavenging credibility at the same conditions. Now piezoelectric materials are being used to harvest ambient energy. In this paper the squared shaped diaphragm based sensor has been designed and simulated to explore the energy generation capability as well as the sensitivity of the sensor using finite element software INTELLISUITE. The analysis shows that the deflection of the diaphragm is in a linear relationship with pressure applied. Also variation of the thickness of the diaphragm as well as the piezoelectric layer is done to study its effect on performance of MEMS piezoelectric pressure sensor.