We demonstrate an integrated Bragg grating filter using 60-nm-thick silicon-on-insulator strip waveguides. The ultra-thin waveguides exhibit a propagation loss of 0.61 dB/cm. Upon thinning-down, the waveguide effective refractive index is reduced, making the fabrication of Bragg grating filter possible using the standard 248-nm deep ultra-violet (DUV) photolithography process. The Bragg grating filter exhibits a stopband width of 1 nm and an extinction ratio of 31 dB.
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机译：我们演示了使用60纳米厚绝缘体上硅条形波导的集成布拉格光栅滤波器。超薄波导的传播损耗为0.61 dB / cm。变薄后，波导的有效折射率会降低，这使得使用标准的248 nm深紫外（DUV）光刻工艺制造布拉格光栅滤光片成为可能。布拉格光栅滤波器的阻带宽度为1 nm，消光比为31 dB。
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