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AN EFFICIENT BUMP PAD DESIGN TO MITIGATE THE FLIP CHIP PACKAGE INDUCED STRESS

机译:一种有效的缓冲垫设计,可减轻芯片倒装引起的应力

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摘要

A numerical analysis using Finite Element Models of different stress buffer configurations has been proposed for improving the reliability of solder joints and at the same time decrease the induced stresses in the back-end-of-line (BEOL). A non-underfilled Flip Chip with a silicon die size of 10×10 mm~2 mounted on a FR4 board has been used as test vehicle. The die to substrate interconnection is done by using copper pillars and Sn solder with a diameter of 50 μm and a total standoff of 50 μm. The thickness of the passivation, a copper pedestal fabricated as a redistribution I/O pad and a polymeric buffer layer with different geometric configurations were used in combination to minimize the induced stresses in the BEOL and increase the flexibility of the copper pillar interconnections. It was found that a stiff layer below the copper pillar has the major contribution to reduce the stress in the BEOL, while the softer buffer layer minimizes the induced plastic strain in the solder interconnection. Fabrication of the samples with optimal configuration are under progress.
机译:为了提高焊点的可靠性,同时减少了后端(BEOL)的感应应力,提出了使用不同应力缓冲配置的有限元模型进行数值分析的建议。已将安装在FR4板上的硅芯片尺寸为10×10 mm〜2的非底部填充倒装芯片用作测试工具。芯片到基板的互连是通过使用直径为50μm,总间距为50μm的铜柱和Sn焊料完成的。结合使用钝化层的厚度,制造为再分配I / O焊盘的铜基座和具有不同几何构型的聚合物缓冲层,以最小化BEOL中的感应应力并增加铜柱互连的柔性。已经发现,铜柱下方的坚硬层对减少BEOL中的应力起了主要作用,而较软的缓冲层则使焊料互连中引起的塑性应变最小。具有最佳配置的样品的制造正在进行中。

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