THERMAL PERFORMANCE ENHANCEMENT OF GLASS INTERPOSER

摘要

As demands on performance for mobile electronics continue to increase, traditional packaging technology is facing its limit in number of input/outputs (I/Os) and thermal challenges. Glass interposers offer many advantages over previous packaging technology for mobile electronics, including ultra-high electrical resistivity, low loss, and lower cost at processed interposer levels. However, it has two fundamental limitations; brittleness and relatively low thermal conductivity (～1 W/mK), compared to Si (～150 W/mK). This paper presents a study on thermal performance enhancement of glass interposer based on thermal modeling, and compares it with silicon interposer. The model captures in-plane and out-of-plane thermal performance enhancement with copper structures incorporated in the interposer. To further study the effect of advanced cooling schemes on interposer technology, an integrated vapor chamber design is evaluated through computational modeling.