A computational model that will be used to study sputtering, deposition, and erosion of surfaces exposed to low energy, low density plasma environments has been developed and validated. Comparisons with sputter yield curve fits and experimental data show favorable agreement and indicate that the model can accurately capture the effects of incidence angle and energy on sputtering behavior. COMSOL simulations were also used to validate view factor and shadowing calculations. This computational model will be used in the future to test the effects of surface architecturing on gross sputter yield and surface erosion rate, and will serve to drive experimental efforts at UCLA.
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