Design of Fault-Tolerant Inductive Position Sensor

摘要

The position sensors used in a magnetic bearing system are desirable to provide some degree of fault-tolerance as the rotor position is necessary for the feedback control. In this paper, we propose an inductive position sensor that can cope with a partial fault in the sensor. The multi-polar structure of the sensor makes it possible to introduce redundancy which can be exploited for fault-tolerant operation. The proposed sensor is applied to a magnetically levitated turbo-molecular vacuum pump. Experimental results validate the fault-tolerance algorithm.