193nm Lithography fabricated high sensitivity photonic crystal microcavity biosensors for plasma protein detection in patients with pancreatic cancer

摘要

High sensitivity L13-type two-dimensional photonic crystal microcavities with nanoholes were fabricated by 193nm photolithography. 0.03 picomolar concentration pancreatic cancer biomarker in patient serum samples was experimentally detected to 10× lower dilution than ELISA.