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Study of the ADR rinse effect on special residual type defect

机译：ADR漂洗对特殊残留型缺陷影响的研究

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In this paper, we study the formation mechanisms of two kinds of residual type defects and present an effective method, the "advanced defect reduction (ADR)" method, to remove them.

机译：在本文中，我们研究了两种残留类型缺陷的形成机理，并提出了一种有效的方法“高级缺陷减少（ADR）”方法来去除它们。

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《China Semiconductor Technology International Conference 》|2015年|1-3|共3页
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Bin Xing; Jingan Hao; Guogui Deng; Qiang Wu;
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2. Special manufacturing operations to prevent residual defects on the tubes [J] . Nuclear news . 2012 ,第10期

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3. Development and parametric study of the convection-type stationary adiabatic demagnetization refrigerator (ADR) for hydrogen re-condensation [J] . Park Jiho, Jeong Sangkwon, Park Inmyong Cryogenics . 2015 ,第Null期

机译：对流式固定式绝热除氢制冷机（ADR）的研制及参数研究
4. Study of the ADR rinse effect on special residual type defect [C] . Bin Xing, Jingan Hao, Guogui Deng, China Semiconductor Technology International Conference . 2015

机译：对特殊残留型缺陷的ADR漂洗效应研究
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Study of the ADR rinse effect on special residual type defect

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